[21p-P3-1~21] 6.2 Carbon-based thin films

[21p-P3-2] Electric properties of Au ohmic-contact on hydrogen-terminated surface-conductive diamond (001)

〇Shozo Kono¹, Hidefumi Inaba², Atsushi Hiraiwa¹, Hiroshi Kawarada^1,2 (1.RONL, Waseda Univ., 2.Fac. Sci. Eng., Waseda Univ.)

Keywords:diamond,Au-electrode,electric properties

Hydrogen-terminated diamonds have a unique property of 2-dimensional p-type surface conductivity (SC) and this conductivity is extensively used in diamond-based field effective transistors . Ohmic contact is an essential element in any semiconductor devise and gold electrodes are usually used in SC-based diamond FET. Components in a Au ohmic electrode on a SC-based diamond device are the contact resistivity (Rc) at the contact layer and the sheet resistivity (Rsk) in the SC layer under Au-electrode. However, There is no consistency among the reported properties. Under the advancement of computer technology, a finite-element analysis of this system may be performed in order to understand the electric characteristics in more detail. In this report, the finite-element analysis of the electric properties of Au ohmic contact on H-terminated diamond (001) single crystals is reported.