[21p-P3-1~21] 6.2 Carbon-based thin films

[21p-P3-21] Emission spectra of boron carbon nitride thin films fabricated by RF-sputtering method

〇Kazuya Uchijima¹, Masaki Satake², Junji Sawahata³, Shigeyuki Nakamura⁴, Ken-ichi Takarabe⁵, Kazutoshi Fukui⁶, Kazutoshi Ikeda⁶, Kunio Itoh¹, Shin-ichi Yamamoto¹ (1.Ryukoku Univ., 2.Akashi Nat. College of Tech., 3.Ibaraki Nat. College of Tech., 4.Tsuyama Nat. College of Tech., 5.Okayama Univ. of Sci., 6.Fukui Univ.)

Keywords:boron carbon nitride