The 63rd JSAP Spring Meeting, 2016

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Poster presentation

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[21p-P4-1~3] 8.2 Plasma measurements and diagnostics

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P4 (Gymnasium)

1:30 PM - 3:30 PM

[21p-P4-2] Diagnosis of Ar/CH4 Plasmas for Diamond-like Carbon Films using Mass Spectrometry

〇SHUN FUKAI1, ODA AKINORI1, KOUSAKA HIROYUKI2, OHTA TAKAYUKI3 (1.Chiba Inst. Technol., 2.Nagoya Univ., 3.Meijo Univ.)

Keywords:plasma,diamond-like carbon