[21p-P6-1~4] 8.5 Nanotechnology

[21p-P6-1] Deposition Simulation in angular variation of glancing-angle reactive evaporation

〇(M1)akihiro nakao¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst of Techno, 2.Kanto Gakuin Univ)

Keywords:Deposition Simulation,reactive evaporation,Isolated Nanocolumnar Structure