[21p-S011-1~20] 17.2 Graphene

[21p-S011-15] Sub-10 nm wide suspended graphene nanoribbon by HIM

Marek Schmidt¹, 〇Ohta Takechi¹, Teruhisa Kanzaki¹, Shinichi Ogawa², Hiroshi Mizuta^1,3 (1.JAIST, 2.AIST, 3.Univ. of Southampton)

Keywords:graphene,suspended,helium ion microscopy

Helium ion microscopy (HIM) and milling are known for highest resolution. It is therefore actively employed for graphene device fabrication and modification. However, when the necessary dose to modify the graphene exceeds a certain value, the substrate starts to swell due to helium bubble formation. This deformation can cause damage to the graphene and methods to mitigate this are actively searched. Here, we avoid damage from substrate swelling by suspending the graphene. Additionally, knock-on damage from the beam-substrate interaction is reduced, leading to sub-10 nm resolution.