[21p-S222-1~9] Advanced Fabrication System for Metal Oixde Thin Films

[21p-S222-2] Sputtering-Assisted Metalorganic Chemical Vapor Deposition and Its Application to Rare-Earth Doped ZnO

〇Yasufumi Fujiwara¹ (1.Osaka Univ.)

Keywords:sputtering-assisted metalorganic vapor phase deposition,rare-earth doped semiconductor,zinc oxide

In this presentation, sputtering-assisted metarorganic vapor phase deposition, developed originally in my laboratory, and its application to rare-earth doped ZnO will be reported.