[21p-S222-1~9] Advanced Fabrication System for Metal Oixde Thin Films

[21p-S222-7] Synthesis of Oxide Semiconductor Alloys and Multilayer Structures by Sol-Gel Method

〇Takashi Yasuda¹ (1.ISU)

Keywords:Sol-Gel Method,ZnO,Multilayer Structure

Synthesis of MgZnCdO thin films by sol-gel dip method will be presennted as follow.
• Bandgap tuning of ZnO
• Fabrications of ZnCdO/ZnO multilayer structures