[22a-H116-1~6] 15.2 II-VI and related compounds

[22a-H116-3] Mesa etching of ZnTe using a HF based etchant

〇Fukino Kazami¹, Wei-Che Sun¹, Jing Wang¹, Taizo Nakasu¹, Shota Hattori¹, Takeru Kizu¹, Yuki Hashimoto¹, Haruna Tamagawa¹, Keisuke Odaka¹, Yosuke Yamamoto¹, Masakazu Kobayashi^1,2, Toshiaki Asahi³ (1.Waseda Univ. Dept. EE&BS., 2.Waseda Univ. Lab.for Mat. Sci. & Tech., 3.JX Nippon Mining & Metals Corp.)

Keywords:ZnTe,Etching,Waveguide