[22a-P5-1~18] 6.4 Thin films and New materials

[22a-P5-18] Cross-sectional observation of Y₂O₃ and Er₂O₃ films deposited by chelate flame method

〇YanXin Dan¹, Atsushi Nakamura^1,2, Keiji Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Chubu Chelest)

Keywords:chelate flame method,Y2O3 films,Er2O3 films

The Y₂O₃ and Er₂O₃ films have been successfully synthesized from the EDTA・Y/Er・H as the raw materials. The aim of this reasrch is to evaluate the crack characteristics of Y₂O₃ and Er₂O₃ films by using composition image that get from SEM.