[22a-P5-1~18] 6.4 Thin films and New materials

[22a-P5-9] Nb:TiO₂/SUS304 structure formed by atmospheric chemical vapor deposition technique

〇Tsuyoshi Kikuta¹, Kobayashi Nozomi¹, Komatsu Keiji¹, Saitoh Hidetoshi¹ (1.Nagaoka Univ. Tech.)

Keywords:oxide,thin firm

We synthesized the Nb:TiO₂ films on the SUS304 substrate by the atmospheric CVD technique. Then, the Nb:TiO₂/ SUS304 structure was subjected to annealing treatment under the reduction atmosphere. On the SUS304 substrate, the α-Fe₂O₃ structure was seen after annealing. In addition, the particle of angular shape was seen in the film surface. The results of elemental analysis revealed that the Nb:TiO₂ film diffused into the SUS304 substrate. After annealing, additional TiO₂ film was deposited.