[22a-P6-1~19] 15.4 III-V-group nitride crystals

[22a-P6-13] Fabrication of planar GaN-LED using the ion implantation techniques

〇(M1C)Seiya Kamizuki¹, Kazuaki Tsuchiyama¹, Keisuke Yamane¹, Hiroto Sekiguchi¹, Hirosi Okada^2,1, Akihiro Wakahara^1,2 (1.Toyohashi Univ. Tech., 2.EIIRIS)

Keywords:photonic device,ion implantation