The 63rd JSAP Spring Meeting, 2016

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16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[22a-W321-1~16] 16.3 Bulk, thin-film and other silicon-based solar cells

Tue. Mar 22, 2016 9:00 AM - 1:15 PM W321 (W2・W3)

Isao Takahashi(Nagoya Univ.), Tsuyoshi Takahama(Panasonic)

11:00 AM - 11:15 AM

[22a-W321-8] High-quality a-Si:H deposited at low-temperature by thermally energized film-precursors

〇Chisato Niikura1, Sichanugrist Porponth2, Shinsuke Miyajima3, Yukimi Ichikawa2, Makoto Konagai2,4 (1.NIMS, 2.FUTURE-PV, JST, 3.Tokyo Tech, 4.Tokyo City Univ.)

Keywords:thin film Si,film growth process,solar cells