[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

△ [22a-W611-10] Control of liquid transport through micro-sized holes: wettability of hole inside treated by nonequilibrium atmospheric pressure plasma processes

〇Takumi Itoh¹, Kenji ishikawa¹, Daisuke Onoshima¹, Hiroshi Yukawa¹, Hiroshi Hashizume¹, Hiromasa Tanaka¹, Naoto Kihara², Kentaro Tatsukoshi², Hidefumi Odaka², Keigo Takeda¹, Hiroki Kondo¹, Makoto Sekine¹, Yoshinobu Baba¹, Masaru Hori¹ (1.Nagoya Univ., 2.Asahi Glass Co., Ltd.)

Keywords:Nonequiliburium atmospheric pressure plasma,fluid control,surface modification

Biochemical analyses of single cell are required to develop a trap technology. Smaller holes than a single cell (10-30 μm) provide a function of trapping each single cell. To disperse cell through holes, fluid transportation through micro-sized holes is problem because a wettability of hole inside becomes potentially problem. To realize the fluid transport, plasma treatments of the micro-sized hole inside have applied for high-throughput of the liquid transport.