The 63rd JSAP Spring Meeting, 2016

Presentation information

Oral presentation

8 Plasma Electronics » 8.3 Deposition of thin film and surface treatment

[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

Tue. Mar 22, 2016 9:00 AM - 12:45 PM W611 (W6)

Jaeho Kim(AIST)

11:45 AM - 12:00 PM

[22a-W611-11] Influence of Ozone in Generation of Chrome Oxid Layer on Stainless Steel

Kohshi Taguchi1, Masahiro Matsumoto1, Yutaka Adachi1, Kazuyuki Noborio1 (1.Sakigake Semiconductor)

Keywords:Sutainless steel,Ozone,Chromium