[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

△ [22a-W611-4] Deposition of NaCl Film by Ion Beam Sputtering

〇masafumi yamano¹, Toru Harigai¹, Yu Miyamoto¹, Takahiro Imai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³, Mamiko Nishiuchi⁴, Hironao Sakaki⁴, Kiminori Kondo⁴ (1.Toyohashi Univ., 2.Itoh Opt. Ind., 3.Onward Ceram. Coat., 4.JAEA)

Keywords:ion beam sputtering