[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

[22a-W611-3] Mechanism Examination in Surface Roughness Improvement of VHF-DC Superimposed Magnetron Sputtering

〇Taku Suyama¹, Takashi Fukui¹, Kenta Setaka¹, Kensuke Sasai¹, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.PLANT Nagoya Univ.)

Keywords:Sputtering