[22p-H103-1~8] 6.4 Thin films and New materials

[22p-H103-7] All-ALD-Grown Films with High Moisture Permeation Barrier -Barrier Characteristics Depending on Multilayer Structures-

〇Hideaki Zama¹, Kazuhiro Honda¹ (1.Institute for Super Materials, ULVAC,Inc.)

Keywords:atomic layer deposition,moisture permission barrier,water vapor transmission rate