Hideaki Zama

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Speaker, Author, Co-Author

Tue. Mar 22, 2016 1:00 PM - 3:00 PM H103 (H)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[22p-H103-1~8] 6.4 Thin films and New materials

2:30 PM - 2:45 PM

[22p-H103-7] All-ALD-Grown Films with High Moisture Permeation Barrier -Barrier Characteristics Depending on Multilayer Structures-

〇Hideaki Zama¹, Kazuhiro Honda¹ (1.Institute for Super Materials, ULVAC,Inc.)