The 63rd JSAP Spring Meeting, 2016

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[22p-H121-1~7] 15.4 III-V-group nitride crystals

Tue. Mar 22, 2016 1:15 PM - 3:00 PM H121 (H)

Masatomo Sumiya(NIMS)

1:45 PM - 2:00 PM

[22p-H121-3] Analysis of Reflectance Monitoring of InGaN/GaN MQW Growth with Temperature Step

〇Yasushi Iyechika1 (1.NuFlare Technology)

Keywords:reflectance analysis,MOCVD,in-situ monitor