MASATAKA HOURAI

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:30 PM - 5:45 PM A204 (204)

Symposium (Oral)
| Symposium
| Science of impurity control in silicon wafers

[5p-A204-1~9] Science of impurity control in silicon wafers

2:00 PM - 2:30 PM

[5p-A204-2] Some topics in the development of various IG-Si wafer products with intrinsic gettering ability

〇MASATAKA HOURAI¹ (1.SUMCO Corporation)