Symposium (Oral)
Symposium » Science of impurity control in silicon wafers
Tue. Sep 5, 2017 1:30 PM - 5:45 PM A204 (204)
Toshiaki Ono(SUMCO), Hiroaki Kariyazaki(GWJ)
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1:30 PM - 2:00 PM
〇Kensuke Okonogi1 (1.Micron Memory Japan)
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2:00 PM - 2:30 PM
〇MASATAKA HOURAI1 (1.SUMCO Corporation)
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2:45 PM - 3:00 PM
〇Haruo Sudo1, Tatsuhiko Aoki1, Susumu Maeda1, Hideyuki Okamura1, Kozo Nakamura3, Koji Sueoka2 (1.GlobalWafers Japan, 2.Faculty of Computer Science and System Engineering, Okayama Prefectural Univ., 3.Regional Cooperative Research Organization, Okayama Prefectural Univ.)
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3:00 PM - 3:15 PM
〇Hideyuki Okamura1, Haruo Sudo1, Kozo Nakamura3, Susumu Maeda1, Koji Sueoka2 (1.GlobalWafers Japan Co., Ltd., 2.Faculty of Computer Science and System Engineering, Okayama Prefectural Univ., 3.Regional Cooperative Research Organization, Okayama Prefectural Univ.)
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3:15 PM - 3:45 PM
〇Koji Sueoka1 (1.Okayama Pref. Univ.)
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3:45 PM - 4:00 PM
〇Koun Shirai1, Takayoshi Fujimura1 (1.ISIR, Osaka Univ.)
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4:15 PM - 4:45 PM
〇Yutaka Ohno1 (1.IMR, Tohoku Univ.)
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4:45 PM - 5:15 PM
〇Kazunari Kurita1 (1.SUMCO CORPORATION)
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5:15 PM - 5:45 PM
〇Nobuhiko SATO1 (1.Canon Inc.)
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