Haruo Sudo

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:30 PM - 5:45 PM A204 (204)

Symposium (Oral)
| Symposium
| Science of impurity control in silicon wafers

[5p-A204-1~9] Science of impurity control in silicon wafers

2:45 PM - 3:00 PM

[5p-A204-3] Morphology observation of oxygen precipitates in ultra-high temperature RTP wafers by TEM

〇Haruo Sudo¹, Tatsuhiko Aoki¹, Susumu Maeda¹, Hideyuki Okamura¹, Kozo Nakamura³, Koji Sueoka² (1.GlobalWafers Japan, 2.Faculty of Computer Science and System Engineering, Okayama Prefectural Univ., 3.Regional Cooperative Research Organization, Okayama Prefectural Univ.)

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