3:00 PM - 3:15 PM
〇Hideyuki Okamura1, Haruo Sudo1, Kozo Nakamura3, Susumu Maeda1, Koji Sueoka2 (1.GlobalWafers Japan Co., Ltd., 2.Faculty of Computer Science and System Engineering, Okayama Prefectural Univ., 3.Regional Cooperative Research Organization, Okayama Prefectural Univ.)