Kazunari Kurita

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:30 PM - 5:45 PM A204 (204)

Symposium (Oral)
| Symposium
| Science of impurity control in silicon wafers

[5p-A204-1~9] Science of impurity control in silicon wafers

4:45 PM - 5:15 PM

[5p-A204-8] Gettering Technology for CMOS Image Sensors Using Cluster Ion Implantation Technique

〇Kazunari Kurita¹ (1.SUMCO CORPORATION)