Yukihiro Tsuji

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:15 PM - 2:45 PM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[7p-A402-1~6] 8.4 Plasma etching

2:15 PM - 2:30 PM

[7p-A402-5] Study of residual gas suppression for etching rate stabilization in the dry etching

〇Yukihiro Tsuji¹, Tetsuya Hattori¹, Masaki Yanagisawa¹, Hajime Shoji¹ (1.Sumitomo Electric Industries, Ltd.)