Ryohei Kawasaki

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 11:00 AM A201 (201)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[7a-A201-1~8] 15.6 Group IV Compound Semiconductors (SiC)

9:00 AM - 9:15 AM

[7a-A201-1] Evaluation of Susceptor Coating Film for SiC Epitaxial Reactor Cleaning Using ClF₃ Gas

Kohei Shioda¹, 〇Ryohei Kawasaki¹, Hitoshi Habuka¹, Hideki Ito², Shin-ichi Mitani², Yoshinao Takahashi³ (1.Yokohama Nat. Univ., 2.NuFlare Technologies, 3.Kanto Denka Kogyo)