Mitsuki Kuwabara

→ Search for Mitsuki Kuwabara in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:30 PM - 3:30 PM PA2 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8p-PA2-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

[8p-PA2-6] Multi-step SOI substrate fabricated by position-selectively wet etching with inkjet mask pattern

〇(M2)Mitsuki Kuwabara¹, Natsumi Tanaka¹, Yasushi Takahashi¹ (1.Osaka Pref. Univ.)