Yoshiyuki Seike

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:15 PM - 4:00 PM A411 (411)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

3:00 PM - 3:15 PM

[8p-A411-7] Electrostatic Discharge Prevention in the Ultra-Pure Water Spray Cleaning of Semiconductor Chips using Induction Charging.

〇Yoshiyuki Seike¹, Taiki Tangiku¹, Yoshinori Kobayashi², Keiji Miyachi², Masahiko Amari², Tatsuo Mori¹ (1.Aichi Insit. Tech., 2.Asahi Sunac)