Risa Goto

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[5p-S42-1~15] 7.3 Micro/Nano patterning and fabrication

3:45 PM - 4:00 PM

△ [5p-S42-9] Fabrication of semiconductor nanopatterns on atomically stepped ultra-flat polymer substrates by thermal nanoimprint technique

〇Risa Goto¹, Shiori Yamada¹, Takumi Sannomiya¹, Satoru Kaneko², Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech. Materials, 2.KISTEC)