Yudai Higa

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PB3 (P)

Poster presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[7p-PB3-1~6] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:30 PM - 3:30 PM

△ [7p-PB3-5] Annealing dependence of active dopant concentration in the ultra-shallow region

〇Yudai Higa¹, Sakura Takeda¹, Tatsuya Ebato¹, Masatoshi Yoneda¹, Akiho Fujinaka¹, Kazuho Morita¹, Natsuki Morimoto¹, Kevin Ang², Xin Tan¹, Hiroshi Daimon¹, Kazuo Tsutsui³ (1.Nara Institute of Science and Technology, 2.Nagoya Institute of Technology, 3.Tokyo Institute of Technology)

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