Takuma Aihara

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 12:15 PM C13 (office 2-2)

Oral presentation
| 3 Optics and Photonics
| 3.15 Silicon photonics

[6a-C13-1~12] 3.15 Silicon photonics

3.13と3.15のコードシェアセッションあり

11:45 AM - 12:00 PM

[6a-C13-11] Characteristics of SiN wavelength filter fabricated by SiD₄ gas

〇Takuma Aihara¹, Tatsurou Hiraki¹, Hidetaka Nishi¹, Tai Tsuchizawa¹, Shinji Matsuo¹ (1.NTT Device Technology Labs.)