Kazuhiro Karahashi

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 11:45 AM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[7a-A402-1~10] 8.4 Plasma etching

9:45 AM - 10:00 AM

[7a-A402-4] Etching reactions of fluorinated layers on metal surfaces exposed to XeF₂

〇Kazuhiro Karahashi¹, Tomoko Ito¹, Satoshi Hamaguchi¹ (1.Osaka Univ.)