Gento Kuroda

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 11:45 AM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[7a-A402-1~10] 8.4 Plasma etching

11:15 AM - 11:30 AM

[7a-A402-9] Synthesis process of nano-crystals on Si substrates in etching of CF₄/Ar plasmas

〇(M2)Gento Kuroda¹, Kazuo Takahashi¹, Koji Nishio¹ (1.Kyoto Inst. of Tech)