Yuya Yamashita

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 9:15 AM - 11:45 AM A413 (413)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma measurements and diagnostics

[5a-A413-1~10] 8.2 Plasma measurements and diagnostics

10:45 AM - 11:00 AM

△ [5a-A413-7] Excitation kinetic model for argon process plasma diagnostics by spectroscopic measurement based on collisional-radiative model

〇(M2)Yuya Yamashita¹, Hiroshi Akatsuka² (1.Tokyo Tech, Sch. Eng., 2.Tokyo Tech, IIR)