Shotaro Wachi

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 9:00 AM - 12:00 PM C11 (Office 1)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[5a-C11-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

10:15 AM - 10:30 AM

[5a-C11-6] A study of fabrication condition of GeO₂layer in HfO₂/GeO₂/Ge structure

〇Shotaro Wachi¹, Yoshitaka Iwazaki¹, Tomo Ueno¹, Koji Yamada¹, Yoshinori Kitahara¹, Mitaro Namiki¹ (1.Noko Univ.)