Takafumi Kamimura

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 9:30 AM - 12:15 PM C17 (Training Room 2)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[5a-C17-1~10] 13.8 Compound and power electron devices and process technology

9:30 AM - 9:45 AM

[5a-C17-1] Ozone MBE Growth of N-doped β-Ga₂O₃ (010) Thin Films and Its Characterization

〇Takafumi Kamimura¹, Yoshiaki Nakata¹, Akito Kuramata², Shigenobu Yamakoshi², Masataka Higashiwaki¹ (1.NICT, 2.Tamura Corp.)