Christopher Stephen Musgrave

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 9:00 AM - 12:00 PM S44 (Conf. Room 5)

Oral presentation
| CS Code-sharing session
| 【CS.9】7.1 & 7.4 Code-sharing session

[5a-S44-1~11] 【CS.9】7.1 & 7.4 Code-sharing session

11:45 AM - 12:00 PM

▲ [5a-S44-11] Gallium-tin alloy as an alternative to liquid tin for the generation of efficient 13.5 nm EUV light

〇(P)Christopher Stephen Musgrave¹, Nan Lu¹, Rie Sato¹, Keiji Nagai¹ (1.Tokyo Tech)