〇Hideki Hirayama¹, Yukio Kashima^1,2, Eriko Matsuura^1,2, Hideki Takagi³, Noritoshi Maeda¹, Masafumi Jo¹, Takeshi Iwai⁴, Toshiro Morita⁴, Mitsunori Kokubo⁵, Takaharu Tashiro⁵, Ryuichiro Kamimura⁶, Yamato Osada⁶ (1.RIKEN, 2.Marubun, 3.AIST, 4.Tokyo Ohka Kogyo, 5.Toshiba Machine, 6.ULVAC)