Hiroyuki Ueda

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:45 PM - 6:15 PM C17 (Training Room 2)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[5p-C17-1~17] 13.8 Compound and power electron devices and process technology

4:45 PM - 5:00 PM

[5p-C17-12] Evaluation of Interface State Distributions in LP-CVD SiO₂/GaN by Deep-Level

〇Hiroyuki Ueda¹, Tomohiko Mori¹, Masato Kodama¹, Yoshitaka Nagasato², Hidemoto Tomita², Kozo Kato² (1.Toyota Central R&D Labs., 2.Toyota Motor Corp.)