Jun Miyawaki

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:30 PM - 3:30 PM PA1 (P)

Poster presentation
| 17 Nanocarbon Technology
| 17 Nanocarbon Technology（Poster）

[5p-PA1-1~82] 17 Nanocarbon Technology（Poster）

1:30 PM - 3:30 PM

[5p-PA1-63] Single Layer Etching of WSe₂ using Inward-Plasma

〇Jun Miyawaki¹, Toshitaka Kubo¹, Tetsuo Shimizu¹, Shun'ichiro Shimbori², Satoshi Takahashi², Kazuhiro Endo³, Atsushi Ando¹ (1.AIST, 2.Sanyu CO., Ltd., 3.Kanazawa Inst. Tech.)