Kenta Watanabe

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[5p-S42-1~15] 7.3 Micro/Nano patterning and fabrication

4:15 PM - 4:30 PM

[5p-S42-11] Computational study on induced strain in direct nanoimprint lithography

〇Kenta Watanabe¹, Tastuya Iida¹, Hiroaki Kawata¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.OPU)