Kyouhei Hashiguchi

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[5p-S42-1~15] 7.3 Micro/Nano patterning and fabrication

5:30 PM - 5:45 PM

△ [5p-S42-15] Evaluation of UV nanoimprint and multilayer lift-off process using spin-on-glass for nanogap electrode array

〇Kyouhei Hashiguchi^1,2, Kenta Suzuki², Hiroshi Hiroshima², Hiroshi Suga¹ (1.CIT, 2.AIST)