Shota Niihara

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[5p-S42-1~15] 7.3 Micro/Nano patterning and fabrication

2:30 PM - 2:45 PM

△ [5p-S42-5] Absorption Coefficient Measurement Advanced Method of EUV Resist by Direct-Resist Coating on a Photodiode

〇(M1)Shota Niihara¹, Daiki Mamezaki¹, Masanori Watanabe¹, Tetsuo Harada¹, Takeo Watanabe¹ (1.Univ. of Hyogo)