Yasushi Sobajima

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 11:45 AM A204 (204)

Oral presentation
| 16 Amorphous and Microcrystalline Materials
| 16.3 Bulk, thin-film and other silicon-based solar cells

[6a-A204-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

10:30 AM - 10:45 AM

[6a-A204-6] Gas temperature estimation of microcrystalline-slicon-film-growth process under high pressure in VHF PECVD

〇Yasushi Sobajima¹, Daisuke Kitano¹, Haruka Kubota¹, Kouhei Kodama¹, Akihisa Matsuda¹, Hiroaki Okamoto¹ (1.Osaka Univ.)