Yuta Urano

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 11:45 AM A414 (414)

Oral presentation
| 3 Optics and Photonics
| 3.8 Optical measurement, instrumentation, and sensor

[6a-A414-1~10] 3.8 Optical measurement, instrumentation, and sensor

9:00 AM - 9:15 AM

[6a-A414-1] Discrimination of subwavelength-size defects on a silicon substrate by polarization detection of laser scattered light

〇Yuta Urano¹, Toshifumi Honda¹ (1.Hitachi R&D Group)