akitsugu Ueda

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 12:30 PM A503 (503)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[6a-A503-1~13] 15.7 Crystal evaluation, impurities and crystal defects

9:00 AM - 9:15 AM

[6a-A503-1] Recovery of residual defect using Flash Lamp Annealing (FLA) tool with milliseconds order

〇akitsugu Ueda¹, Kazuhiko Fuse¹, Makoto Abe¹, Takayuki Aoyama¹, Shinichi Kato¹, Ippei Kobayashi¹ (1.SCREEN)