Yoshihiro Koga

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 12:30 PM A503 (503)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[6a-A503-1~13] 15.7 Crystal evaluation, impurities and crystal defects

9:30 AM - 9:45 AM

[6a-A503-3] Characteristic of Molecular Cluster Ion Implanted Epitaxial Silicon Wafer (2)
- Gettering Heavy Metal of Room Temperature Bonding Wafer -

〇Yoshihiro Koga¹, Takeshi Kadono¹, Ryosuke Okuyama¹, Satoshi Shigematsu¹, Ryo Hirose¹, Ayumi Masada¹, Hidehiko Okuda¹, Kazunari Kurita¹ (1.SUMCO CORPORATION)