HIDEHIKO OKUDA

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 12:30 PM A503 (503)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[6a-A503-1~13] 15.7 Crystal evaluation, impurities and crystal defects

9:45 AM - 10:00 AM

[6a-A503-4] Characteristic of Molecular Ion Implanted Epitaxial Wafer (3)
-Analysis of Gettering Behavior of Double Epitaxial Wafer-

〇HIDEHIKO OKUDA¹, AYUMI MASADA¹, SATOSHI SHIGEMATSU¹, RYOU HIROSE¹, TAKESHI KADONO¹, RYOUSUKE OKUYAMA¹, YOSHIHIRO KOGA¹, KAZUNARI KURITA¹ (1.SUMCO)