Satoshi Shigematsu

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 12:30 PM A503 (503)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[6a-A503-1~13] 15.7 Crystal evaluation, impurities and crystal defects

10:00 AM - 10:15 AM

△ [6a-A503-5] Characteristic of Molecular Ion Implanted Epitaxial Wafer (4)
-Analysis of Gettering Mechanism for Heavy Metal by Using Atom Probe Tomography-

〇Satoshi Shigematsu¹, Ryosuke Okuyama¹, Ryo Hirose¹, Ayumi Masada¹, Takeshi Kadono¹, Yoshihiro Koga¹, Hidehiko Okuda¹, Kazunari Kurita¹ (1.SUMCO)