Yuto Morita

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 9:00 AM - 12:45 PM C14 (office 3-1)

Oral presentation
| 3 Optics and Photonics
| 3.13 Semiconductor optical devices

[6a-C14-1~14] 3.13 Semiconductor optical devices

3.13と3.15のコードシェアセッションあり

9:00 AM - 9:15 AM

[6a-C14-1] Single Step ICP (Inductively Coupled Plasmas) Dry-Etching Condition for Lateral pin Waveguide

〇Yuto Morita¹, Haisong Jiang¹, Kiich Hamamoto¹ (1.Kyushu Univ.)